AXCELIS TECHNOLOGIES INC

CUSIP: 054540109 Class: COMMON STOCK

PRICE T ROWE ASSOCIATES INC /MD/'s Holding History (CIK: 0000080255)

Note: Option positions (PUT/CALL) are excluded.

Q2 2016
Shares 62,214 Value ($000) $167 Avg Close — Range —
Q1 2016
Shares 62,214 Value ($000) $174 Avg Close — Range —
Q4 2015
Shares 62,214 Value ($000) $161 Avg Close — Range —
Q3 2015
Shares 61,914 Value ($000) $165 Avg Close — Range —
Q2 2015
Shares 61,914 Value ($000) $183 Avg Close — Range —
Q1 2015
Shares 61,914 Value ($000) $147 Avg Close — Range —
Q4 2014
Shares 61,914 Value ($000) $158 Avg Close — Range —
Q3 2014
Shares 61,914 Value ($000) $123 Avg Close — Range —
Q2 2014
Shares 61,914 Value ($000) $124 Avg Close — Range —
Q1 2014
Shares 61,914 Value ($000) $133 Avg Close — Range —
Q4 2013
Shares 61,914 Value ($000) $151 Avg Close — Range —
Q3 2013
Shares 61,914 Value ($000) $131 Avg Close — Range —
Q2 2013
Shares 28,814 Value ($000) $52 Avg Close — Range —