AXCELIS TECHNOLOGIES INC

CUSIP: 054540109 Class: COMMON STOCK

DIMENSIONAL FUND ADVISORS LP's Holding History (CIK: 0000354204)

Note: Option positions (PUT/CALL) are excluded.

Q2 2016
Shares 1,510,268 Value ($000) $4,062 Avg Close — Range —
Q1 2016
Shares 5,726,099 Value ($000) $16,033 Avg Close — Range —
Q4 2015
Shares 5,470,728 Value ($000) $14,169 Avg Close — Range —
Q3 2015
Shares 5,026,785 Value ($000) $13,422 Avg Close — Range —
Q2 2015
Shares 4,661,438 Value ($000) $13,798 Avg Close — Range —
Q1 2015
Shares 4,400,266 Value ($000) $10,473 Avg Close — Range —
Q4 2014
Shares 4,085,029 Value ($000) $10,458 Avg Close — Range —
Q3 2014
Shares 4,113,113 Value ($000) $8,185 Avg Close — Range —
Q2 2014
Shares 4,194,823 Value ($000) $8,389 Avg Close — Range —
Q1 2014
Shares 4,226,090 Value ($000) $9,086 Avg Close — Range —
Q4 2013
Shares 4,365,007 Value ($000) $10,651 Avg Close — Range —
Q3 2013
Shares 3,819,013 Value ($000) $8,058 Avg Close — Range —
Q2 2013
Shares 3,723,980 Value ($000) $6,778 Avg Close — Range —