AXCELIS TECHNOLOGIES INC

CUSIP: 054540109 Class: COMMON STOCK

PRIMECAP MANAGEMENT CO/CA/'s Holding History (CIK: 0000763212)

Note: Option positions (PUT/CALL) are excluded.

Q2 2016
Shares 13,874,200 Value ($000) $37,322 Avg Close — Range —
Q1 2016
Shares 13,809,200 Value ($000) $38,666 Avg Close — Range —
Q4 2015
Shares 13,674,200 Value ($000) $35,416 Avg Close — Range —
Q3 2015
Shares 12,465,000 Value ($000) $33,282 Avg Close — Range —
Q2 2015
Shares 12,342,000 Value ($000) $36,532 Avg Close — Range —
Q1 2015
Shares 12,342,000 Value ($000) $29,374 Avg Close — Range —
Q4 2014
Shares 12,342,000 Value ($000) $31,596 Avg Close — Range —
Q3 2014
Shares 11,640,000 Value ($000) $23,164 Avg Close — Range —
Q2 2014
Shares 9,241,100 Value ($000) $18,482 Avg Close — Range —
Q1 2014
Shares 5,262,606 Value ($000) $11,315 Avg Close — Range —