AXCELIS TECHNOLOGIES INC

CUSIP: 054540109 Class: COMMON STOCK

KENNEDY CAPITAL MANAGEMENT LLC's Holding History (CIK: 0000884589)

Note: Option positions (PUT/CALL) are excluded.

Q1 2016
Shares 1,128,452 Value ($000) $3,160 Avg Close — Range —
Q4 2015
Shares 1,139,622 Value ($000) $2,952 Avg Close — Range —
Q3 2015
Shares 1,093,343 Value ($000) $2,919 Avg Close — Range —
Q2 2015
Shares 1,461,028 Value ($000) $4,325 Avg Close — Range —
Q1 2015
Shares 1,471,109 Value ($000) $3,501 Avg Close — Range —
Q4 2014
Shares 651,225 Value ($000) $1,667 Avg Close — Range —
Q3 2014
Shares 652,201 Value ($000) $1,298 Avg Close — Range —
Q2 2014
Shares 653,243 Value ($000) $1,306 Avg Close — Range —
Q1 2014
Shares 545,630 Value ($000) $1,173 Avg Close — Range —