AXCELIS TECHNOLOGIES INC

CUSIP: 054540109 Class: COMMON STOCK

ROYCE & ASSOCIATES LP's Holding History (CIK: 0000906304)

Note: Option positions (PUT/CALL) are excluded.

Q2 2016
Shares 1,637,688 Value ($000) $4,405 Avg Close — Range —
Q1 2016
Shares 3,251,888 Value ($000) $9,105 Avg Close — Range —
Q4 2015
Shares 3,899,095 Value ($000) $10,099 Avg Close — Range —
Q3 2015
Shares 2,773,695 Value ($000) $7,406 Avg Close — Range —
Q2 2015
Shares 1,976,495 Value ($000) $5,850 Avg Close — Range —
Q1 2015
Shares 2,086,495 Value ($000) $4,966 Avg Close — Range —
Q4 2014
Shares 2,208,995 Value ($000) $5,655 Avg Close — Range —
Q3 2014
Shares 2,218,895 Value ($000) $4,416 Avg Close — Range —
Q2 2014
Shares 2,218,895 Value ($000) $4,438 Avg Close — Range —
Q1 2014
Shares 2,131,395 Value ($000) $4,582 Avg Close — Range —
Q4 2013
Shares 1,956,494 Value ($000) $4,774 Avg Close — Range —
Q3 2013
Shares 1,766,494 Value ($000) $3,727 Avg Close — Range —
Q2 2013
Shares 1,591,494 Value ($000) $2,897 Avg Close — Range —