AXCELIS TECHNOLOGIES INC

CUSIP: 054540109 Class: COMMON STOCK

IRIDIAN ASSET MANAGEMENT LLC/CT's Holding History (CIK: 0001033427)

Note: Option positions (PUT/CALL) are excluded.

Q3 2015
Shares 127,675 Value ($000) $341 Avg Close — Range —
Q2 2015
Shares 127,675 Value ($000) $378 Avg Close — Range —
Q1 2015
Shares 117,110 Value ($000) $279 Avg Close — Range —
Q4 2014
Shares 117,110 Value ($000) $300 Avg Close — Range —
Q3 2014
Shares 178,580 Value ($000) $355 Avg Close — Range —
Q2 2014
Shares 178,580 Value ($000) $357 Avg Close — Range —
Q1 2014
Shares 251,250 Value ($000) $540 Avg Close — Range —
Q4 2013
Shares 328,840 Value ($000) $802 Avg Close — Range —
Q3 2013
Shares 293,730 Value ($000) $620 Avg Close — Range —
Q2 2013
Shares 294,040 Value ($000) $535 Avg Close — Range —