AXCELIS TECHNOLOGIES INC

CUSIP: 054540109 Class: COMMON STOCK

PROFUND ADVISORS LLC's Holding History (CIK: 0001129919)

Note: Option positions (PUT/CALL) are excluded.

Q2 2014
Shares 14,430 Value ($000) $29 Avg Close — Range —
Q1 2014
Shares 15,000 Value ($000) $32 Avg Close — Range —