CASCADE MICROTECH INC

CUSIP: 147322101 Class: COMMON STOCK

GLOBEFLEX CAPITAL L P's Holding History (CIK: 0000921531)

Note: Option positions (PUT/CALL) are excluded.

Q4 2015
Shares 79,576 Value ($000) $1,293 Avg Close — Range —
Q3 2015
Shares 78,076 Value ($000) $1,104 Avg Close — Range —
Q2 2015
Shares 90,376 Value ($000) $1,376 Avg Close — Range —