ENTEGRIS INC

Ticker: ENTG CUSIP: 29362U104 Class: EQTY

ROYCE & ASSOCIATES LP's Holding History (CIK: 0000906304)

Note: Option positions (PUT/CALL) are excluded.

Q2 2022

Shares 7,500 Value ($000) $691 Avg Close $106.67 Range $89.00 - $130.58

Q1 2022

Shares 20,100 Value ($000) $2,638 Avg Close $126.46 Range $105.59 - $139.53

Q4 2021

Shares 20,100 Value ($000) $2,785 Avg Close $137.46 Range $116.03 - $155.32

Q3 2021

Shares 20,100 Value ($000) $2,531 Avg Close $118.42 Range $107.47 - $133.60

Q2 2021

Shares 22,700 Value ($000) $2,791 Avg Close $112.78 Range $99.32 - $124.02

Q1 2021

Shares 53,100 Value ($000) $5,937 Avg Close $101.00 Range $91.73 - $111.76

Q4 2020

Shares 138,916 Value ($000) $13,350 Avg Close $85.63 Range $72.68 - $98.15

Q3 2020

Shares 182,416 Value ($000) $13,561 Avg Close $65.62 Range $54.94 - $73.61

Q2 2020

Shares 363,016 Value ($000) $21,436 Avg Close $54.31 Range $39.60 - $63.49

Q1 2020

Shares 366,616 Value ($000) $16,413 Avg Close $50.63 Range $37.23 - $57.68

Q4 2019

Shares 376,316 Value ($000) $18,850 Avg Close $47.00 Range $43.45 - $50.25

Q3 2019

Shares 477,699 Value ($000) $22,481 Avg Close $41.06 Range $34.02 - $47.16

Q2 2019

Shares 547,299 Value ($000) $20,425 Avg Close $36.83 Range $32.80 - $40.83

Q1 2019

Shares 539,899 Value ($000) $19,269 Avg Close $32.31 Range $26.52 - $39.16

Q4 2018

Shares 596,199 Value ($000) $16,631 Avg Close $26.16 Range $22.58 - $29.45

Q3 2018

Shares 573,880 Value ($000) $16,614 Avg Close $32.48 Range $27.54 - $37.24

Q2 2018

Shares 357,903 Value ($000) $12,133 Avg Close $34.08 Range $30.69 - $38.11

Q1 2018

Shares 262,755 Value ($000) $9,144 Avg Close $32.52 Range $28.08 - $36.78

Q4 2017

Shares 92,080 Value ($000) $2,804 Avg Close $29.39 Range $27.05 - $31.71

Q3 2017

Shares 72,500 Value ($000) $2,092 Avg Close $24.35 Range $20.85 - $27.77

Q1 2014

Shares 2,932,442 Value ($000) $35,512 Avg Close $11.16 Range $9.77 - $11.97

Q4 2013

Shares 6,745,314 Value ($000) $78,246 Avg Close $10.11 Range $9.45 - $11.15

Q3 2013

Shares 6,974,297 Value ($000) $70,789 Avg Close $9.26 Range $8.59 - $10.19

Q2 2013

Shares 5,754,700 Value ($000) $54,037 Avg Close $9.27 Range $8.51 - $10.07

Period	Shares	Value ($000)	Average Close	Price Range
Q2 2022	7,500	$691	$106.67	$89.00 - $130.58
Q1 2022	20,100	$2,638	$126.46	$105.59 - $139.53
Q4 2021	20,100	$2,785	$137.46	$116.03 - $155.32
Q3 2021	20,100	$2,531	$118.42	$107.47 - $133.60
Q2 2021	22,700	$2,791	$112.78	$99.32 - $124.02
Q1 2021	53,100	$5,937	$101.00	$91.73 - $111.76
Q4 2020	138,916	$13,350	$85.63	$72.68 - $98.15
Q3 2020	182,416	$13,561	$65.62	$54.94 - $73.61
Q2 2020	363,016	$21,436	$54.31	$39.60 - $63.49
Q1 2020	366,616	$16,413	$50.63	$37.23 - $57.68
Q4 2019	376,316	$18,850	$47.00	$43.45 - $50.25
Q3 2019	477,699	$22,481	$41.06	$34.02 - $47.16
Q2 2019	547,299	$20,425	$36.83	$32.80 - $40.83
Q1 2019	539,899	$19,269	$32.31	$26.52 - $39.16
Q4 2018	596,199	$16,631	$26.16	$22.58 - $29.45
Q3 2018	573,880	$16,614	$32.48	$27.54 - $37.24
Q2 2018	357,903	$12,133	$34.08	$30.69 - $38.11
Q1 2018	262,755	$9,144	$32.52	$28.08 - $36.78
Q4 2017	92,080	$2,804	$29.39	$27.05 - $31.71
Q3 2017	72,500	$2,092	$24.35	$20.85 - $27.77
Q1 2014	2,932,442	$35,512	$11.16	$9.77 - $11.97
Q4 2013	6,745,314	$78,246	$10.11	$9.45 - $11.15
Q3 2013	6,974,297	$70,789	$9.26	$8.59 - $10.19
Q2 2013	5,754,700	$54,037	$9.27	$8.51 - $10.07