ONTO INNOVATION INC

Ticker: ONTO CUSIP: 683344105 Class: EQTY

ROYCE & ASSOCIATES LP's Holding History (CIK: 0000906304)

Note: Option positions (PUT/CALL) are excluded.

Q4 2025

Shares 365,735 Value ($000) $57,735 Avg Close $142.02 Range $118.97 - $171.32

Q3 2025

Shares 307,476 Value ($000) $39,732 Avg Close $107.03 Range $89.40 - $142.77

Q2 2025

Shares 261,298 Value ($000) $26,373 Avg Close $106.80 Range $85.88 - $136.24

Q1 2025

Shares 219,608 Value ($000) $26,647 Avg Close $168.38 Range $116.16 - $228.42

Q4 2024

Shares 219,648 Value ($000) $36,609 Avg Close $182.71 Range $156.88 - $226.73

Q3 2024

Shares 223,158 Value ($000) $46,319 Avg Close $201.83 Range $145.15 - $238.93

Q2 2024

Shares 242,632 Value ($000) $53,272 Avg Close $206.70 Range $166.65 - $238.13

Q1 2024

Shares 250,661 Value ($000) $45,390 Avg Close $168.90 Range $134.11 - $199.72

Q4 2023

Shares 362,917 Value ($000) $55,490 Avg Close $134.52 Range $108.98 - $158.50

Q3 2023

Shares 449,375 Value ($000) $57,304 Avg Close $118.86 Range $103.94 - $142.26

Q2 2023

Shares 431,080 Value ($000) $50,208 Avg Close $95.40 Range $76.40 - $117.99

Q1 2023

Shares 539,110 Value ($000) $47,377 Avg Close $81.11 Range $67.55 - $89.75

Q4 2022

Shares 539,090 Value ($000) $36,707 Avg Close $71.84 Range $56.02 - $86.86

Q3 2022

Shares 631,897 Value ($000) $40,473 Avg Close $73.47 Range $59.95 - $89.69

Q2 2022

Shares 636,757 Value ($000) $44,407 Avg Close $74.00 Range $67.17 - $88.91

Q1 2022

Shares 529,087 Value ($000) $45,972 Avg Close $88.92 Range $73.67 - $106.09

Q4 2021

Shares 455,545 Value ($000) $46,115 Avg Close $86.29 Range $69.51 - $103.77

Q3 2021

Shares 626,489 Value ($000) $45,264 Avg Close $72.11 Range $62.15 - $79.99

Q2 2021

Shares 658,972 Value ($000) $48,131 Avg Close $68.70 Range $56.56 - $75.61

Q1 2021

Shares 791,192 Value ($000) $51,989 Avg Close $59.55 Range $47.34 - $67.77

Q4 2020

Shares 895,300 Value ($000) $42,572 Avg Close $40.09 Range $29.98 - $49.11

Q3 2020

Shares 768,638 Value ($000) $22,890 Avg Close $33.17 Range $28.08 - $39.47

Q2 2020

Shares 758,475 Value ($000) $25,818 Avg Close $32.51 Range $26.41 - $36.47

Q1 2020

Shares 856,122 Value ($000) $25,401 Avg Close $34.20 Range $20.32 - $42.50

Q4 2019

Shares 1,024,761 Value ($000) $37,445 Avg Close $34.27 Range $31.34 - $36.83

Period	Shares	Value ($000)	Average Close	Price Range
Q4 2025	365,735	$57,735	$142.02	$118.97 - $171.32
Q3 2025	307,476	$39,732	$107.03	$89.40 - $142.77
Q2 2025	261,298	$26,373	$106.80	$85.88 - $136.24
Q1 2025	219,608	$26,647	$168.38	$116.16 - $228.42
Q4 2024	219,648	$36,609	$182.71	$156.88 - $226.73
Q3 2024	223,158	$46,319	$201.83	$145.15 - $238.93
Q2 2024	242,632	$53,272	$206.70	$166.65 - $238.13
Q1 2024	250,661	$45,390	$168.90	$134.11 - $199.72
Q4 2023	362,917	$55,490	$134.52	$108.98 - $158.50
Q3 2023	449,375	$57,304	$118.86	$103.94 - $142.26
Q2 2023	431,080	$50,208	$95.40	$76.40 - $117.99
Q1 2023	539,110	$47,377	$81.11	$67.55 - $89.75
Q4 2022	539,090	$36,707	$71.84	$56.02 - $86.86
Q3 2022	631,897	$40,473	$73.47	$59.95 - $89.69
Q2 2022	636,757	$44,407	$74.00	$67.17 - $88.91
Q1 2022	529,087	$45,972	$88.92	$73.67 - $106.09
Q4 2021	455,545	$46,115	$86.29	$69.51 - $103.77
Q3 2021	626,489	$45,264	$72.11	$62.15 - $79.99
Q2 2021	658,972	$48,131	$68.70	$56.56 - $75.61
Q1 2021	791,192	$51,989	$59.55	$47.34 - $67.77
Q4 2020	895,300	$42,572	$40.09	$29.98 - $49.11
Q3 2020	768,638	$22,890	$33.17	$28.08 - $39.47
Q2 2020	758,475	$25,818	$32.51	$26.41 - $36.47
Q1 2020	856,122	$25,401	$34.20	$20.32 - $42.50
Q4 2019	1,024,761	$37,445	$34.27	$31.34 - $36.83