ULTRATECH INC

CUSIP: 904034105 Class: COM

FRONTIER CAPITAL MANAGEMENT CO LLC's Holding History (CIK: 0000351173)

Note: Option positions (PUT/CALL) are excluded.

Q1 2017
Shares 1,946,000 Value ($000) $57,641 Avg Close — Range —
Q4 2016
Shares 1,944,755 Value ($000) $46,635 Avg Close — Range —
Q3 2016
Shares 1,915,360 Value ($000) $44,207 Avg Close — Range —
Q2 2016
Shares 1,873,338 Value ($000) $43,031 Avg Close — Range —
Q1 2016
Shares 1,899,022 Value ($000) $41,475 Avg Close — Range —
Q4 2015
Shares 1,881,188 Value ($000) $37,285 Avg Close — Range —
Q3 2015
Shares 1,883,713 Value ($000) $30,177 Avg Close — Range —
Q2 2015
Shares 1,897,600 Value ($000) $35,219 Avg Close — Range —
Q1 2015
Shares 1,873,251 Value ($000) $32,482 Avg Close — Range —
Q4 2014
Shares 2,286,202 Value ($000) $42,432 Avg Close — Range —
Q3 2014
Shares 2,580,813 Value ($000) $58,713 Avg Close — Range —
Q2 2014
Shares 2,587,272 Value ($000) $57,386 Avg Close — Range —
Q1 2014
Shares 2,264,741 Value ($000) $66,108 Avg Close — Range —
Q4 2013
Shares 1,448,710 Value ($000) $42,013 Avg Close — Range —
Q3 2013
Shares 748,670 Value ($000) $22,685 Avg Close — Range —
Q2 2013
Shares 663,240 Value ($000) $24,354 Avg Close — Range —