ULTRATECH INC

CUSIP: 904034105 Class: COM

ROYCE & ASSOCIATES LP's Holding History (CIK: 0000906304)

Note: Option positions (PUT/CALL) are excluded.

Q1 2016
Shares 93,300 Value ($000) $2,038 Avg Close — Range —
Q4 2015
Shares 138,300 Value ($000) $2,741 Avg Close — Range —
Q3 2015
Shares 280,000 Value ($000) $4,486 Avg Close — Range —
Q2 2015
Shares 280,000 Value ($000) $5,197 Avg Close — Range —
Q1 2015
Shares 151,200 Value ($000) $2,622 Avg Close — Range —
Q4 2014
Shares 94,400 Value ($000) $1,752 Avg Close — Range —
Q3 2014
Shares 242,240 Value ($000) $5,511 Avg Close — Range —
Q2 2014
Shares 466,740 Value ($000) $10,352 Avg Close — Range —
Q1 2014
Shares 484,540 Value ($000) $14,144 Avg Close — Range —
Q4 2013
Shares 429,040 Value ($000) $12,442 Avg Close — Range —
Q3 2013
Shares 527,441 Value ($000) $15,981 Avg Close — Range —
Q2 2013
Shares 408,541 Value ($000) $15,002 Avg Close — Range —