ULTRATECH INC

CUSIP: 904034105 Class: COM

MASSACHUSETTS FINANCIAL SERVICES CO /MA/'s Holding History (CIK: 0000912938)

Note: Option positions (PUT/CALL) are excluded.

Q4 2016
Shares 151,981 Value ($000) $3,645 Avg Close — Range —
Q3 2016
Shares 132,323 Value ($000) $3,054 Avg Close — Range —
Q2 2016
Shares 159,311 Value ($000) $3,659 Avg Close — Range —
Q1 2016
Shares 342,320 Value ($000) $7,476 Avg Close — Range —
Q4 2015
Shares 383,060 Value ($000) $7,592 Avg Close — Range —
Q3 2015
Shares 306,374 Value ($000) $4,908 Avg Close — Range —
Q2 2015
Shares 255,446 Value ($000) $4,741,078 Avg Close — Range —
Q1 2015
Shares 252,241 Value ($000) $4,373,859 Avg Close — Range —
Q4 2014
Shares 218,561 Value ($000) $4,056,492 Avg Close — Range —
Q3 2014
Shares 193,796 Value ($000) $4,409 Avg Close — Range —
Q2 2014
Shares 133,298 Value ($000) $2,957 Avg Close — Range —
Q1 2014
Shares 2,494,090 Value ($000) $72,802,487 Avg Close — Range —
Q4 2013
Shares 2,507,090 Value ($000) $72,705,610 Avg Close — Range —
Q3 2013
Shares 2,061,140 Value ($000) $62,452,542 Avg Close — Range —
Q2 2013
Shares 1,865,300 Value ($000) $68,493,816 Avg Close — Range —