ULTRATECH INC

CUSIP: 904034105 Class: COM

PALISADE CAPITAL MANAGEMENT, LP's Holding History (CIK: 0001009006)

Note: Option positions (PUT/CALL) are excluded.

Q2 2016
Shares 61,500 Value ($000) $1,413 Avg Close — Range —
Q1 2016
Shares 67,650 Value ($000) $1,477 Avg Close — Range —
Q3 2013
Shares 489,212 Value ($000) $14,823 Avg Close — Range —
Q2 2013
Shares 135,593 Value ($000) $4,979 Avg Close — Range —