ULTRATECH INC

CUSIP: 904034105 Class: COM

PROFUND ADVISORS LLC's Holding History (CIK: 0001129919)

Note: Option positions (PUT/CALL) are excluded.

Q4 2013
Shares 13,697 Value ($000) $397 Avg Close — Range —
Q3 2013
Shares 6,906 Value ($000) $209 Avg Close — Range —
Q2 2013
Shares 5,642 Value ($000) $207 Avg Close — Range —