ULTRATECH INC

CUSIP: 904034105 Class: COM

GUGGENHEIM CAPITAL LLC's Holding History (CIK: 0001283072)

Note: Option positions (PUT/CALL) are excluded.

Q1 2017
Shares 8,337 Value ($000) $247 Avg Close — Range —
Q4 2015
Shares 65,626 Value ($000) $1,301 Avg Close — Range —
Q3 2015
Shares 72,291 Value ($000) $1,158 Avg Close — Range —
Q2 2015
Shares 77,704 Value ($000) $1,442 Avg Close — Range —
Q3 2013
Shares 47,371 Value ($000) $1,436 Avg Close — Range —
Q2 2013
Shares 39,975 Value ($000) $1,468 Avg Close — Range —