ULTRATECH INC

CUSIP: 904034105 Class: COM

Robeco Institutional Asset Management B.V.'s Holding History (CIK: 0001418773)

Note: Option positions (PUT/CALL) are excluded.

Q4 2016
Shares 155,862 Value ($000) $3,738 Avg Close — Range —
Q3 2016
Shares 155,862 Value ($000) $3,599 Avg Close — Range —
Q2 2016
Shares 74,308 Value ($000) $1,707 Avg Close — Range —