ULTRATECH INC

CUSIP: 904034105 Class: COM

Nantahala Capital Management, LLC's Holding History (CIK: 0001472322)

Note: Option positions (PUT/CALL) are excluded.

Q1 2014
Shares 170,000 Value ($000) $4,962 Avg Close — Range —
Q4 2013
Shares 110,000 Value ($000) $3,190 Avg Close — Range —