ZYGO CORP

CUSIP: 989855101 Class: CMN

PRICE T ROWE ASSOCIATES INC /MD/'s Holding History (CIK: 0000080255)

Note: Option positions (PUT/CALL) are excluded.

Q1 2014
Shares 1,686,850 Value ($000) $25,623 Avg Close — Range —
Q4 2013
Shares 1,679,520 Value ($000) $24,823 Avg Close — Range —
Q3 2013
Shares 1,669,360 Value ($000) $26,676 Avg Close — Range —
Q2 2013
Shares 1,672,460 Value ($000) $26,442 Avg Close — Range —