ZYGO CORP

CUSIP: 989855101 Class: CMN

DIMENSIONAL FUND ADVISORS LP's Holding History (CIK: 0000354204)

Note: Option positions (PUT/CALL) are excluded.

Q1 2014
Shares 1,214,401 Value ($000) $18,447 Avg Close — Range —
Q4 2013
Shares 1,205,243 Value ($000) $17,813 Avg Close — Range —
Q3 2013
Shares 1,104,333 Value ($000) $17,647 Avg Close — Range —
Q2 2013
Shares 1,111,986 Value ($000) $17,580 Avg Close — Range —