ZYGO CORP

CUSIP: 989855101 Class: CMN

ROYCE & ASSOCIATES LP's Holding History (CIK: 0000906304)

Note: Option positions (PUT/CALL) are excluded.

Q1 2014
Shares 800,176 Value ($000) $12,155 Avg Close — Range —
Q4 2013
Shares 665,818 Value ($000) $9,841 Avg Close — Range —
Q3 2013
Shares 591,900 Value ($000) $9,459 Avg Close — Range —
Q2 2013
Shares 560,101 Value ($000) $8,855 Avg Close — Range —