ZYGO CORP

CUSIP: 989855101 Class: CMN

Invesco Ltd.'s Holding History (CIK: 0000914208)

Note: Option positions (PUT/CALL) are excluded.

Q1 2014
Shares 13,945 Value ($000) $212 Avg Close — Range —
Q4 2013
Shares 9,207 Value ($000) $136 Avg Close — Range —
Q3 2013
Shares 8,529 Value ($000) $136 Avg Close — Range —
Q2 2013
Shares 7,683 Value ($000) $122 Avg Close — Range —