ZYGO CORP

CUSIP: 989855101 Class: CMN

NEEDHAM INVESTMENT MANAGEMENT LLC's Holding History (CIK: 0001167212)

Note: Option positions (PUT/CALL) are excluded.

Q1 2014
Shares 416,739 Value ($000) $6,330 Avg Close — Range —
Q4 2013
Shares 286,375 Value ($000) $4,233 Avg Close — Range —