AMTECH SYS INC

Ticker: ASYS CUSIP: 032332504 Class: COM PAR $0.01N

MUFG Americas Holdings Corp's Holding History (CIK: 0001011659)

Note: Option positions (PUT/CALL) are excluded.

Q3 2011

Shares 20,300 Value ($000) $162 Avg Close — Range —

Q2 2011

Shares 20,300 Value ($000) $419 Avg Close — Range —

Q1 2011

Shares 20,300 Value ($000) $512 Avg Close — Range —

Q4 2010

Shares 20,300 Value ($000) $511 Avg Close — Range —

Period	Shares	Value ($000)	Average Close	Price Range
Q3 2011	20,300	$162	—	—
Q2 2011	20,300	$419	—	—
Q1 2011	20,300	$512	—	—
Q4 2010	20,300	$511	—	—