AMTECH SYS INC

Ticker: ASYS CUSIP: 032332504 Class: COM PAR $0.01N

Note: Option positions (PUT/CALL) are excluded.

InstitutionSharesValue ($000)
First Eagle Investment Management, LLC734,346$9,216
DIMENSIONAL FUND ADVISORS LP672,107$8,435
VANGUARD GROUP INC631,905$7,930
Pacific Ridge Capital Partners, LLC627,811$7,879
MARSHALL WACE, LLP352,624$4,425
ARROWSTREET CAPITAL, LIMITED PARTNERSHIP347,033$4,355
JANE STREET GROUP, LLC325,754$4,088
ACADIAN ASSET MANAGEMENT LLC236,008$3
RENAISSANCE TECHNOLOGIES LLC146,596$1,840
BlackRock, Inc.134,477$1,688
GEODE CAPITAL MANAGEMENT, LLC133,001$1,670
CITADEL ADVISORS LLC124,843$1,567
TWO SIGMA INVESTMENTS, LP111,437$1,399
BRIDGEWAY CAPITAL MANAGEMENT, LLC96,318$1,209
Trexquant Investment LP89,365$1,122
SUSQUEHANNA INTERNATIONAL GROUP, LLP80,630$1,012
GOLDMAN SACHS GROUP INC78,693$988
EAM Investors, LLC74,305$933
TWO SIGMA ADVISERS, LP69,997$878
XTX Topco Ltd69,381$871
Point72 Asset Management, L.P.68,154$855
Connor, Clark & Lunn Investment Management Ltd.66,877$839
STATE STREET CORP62,790$788
O'SHAUGHNESSY ASSET MANAGEMENT, LLC60,963$765
SEI INVESTMENTS CO45,233$568
Qube Research & Technologies Ltd41,978$527
RITHOLTZ WEALTH MANAGEMENT39,572$497
NORTHERN TRUST CORP39,177$492
ESSEX INVESTMENT MANAGEMENT CO LLC37,816$475
Merit Financial Group, LLC37,000$464
Janney Montgomery Scott LLC30,760$0
GSA CAPITAL PARTNERS LLP30,748$0
Quadrature Capital Ltd30,542$383
Jump Financial, LLC30,300$380
IRONWOOD INVESTMENT MANAGEMENT LLC27,537$346
BNP PARIBAS ARBITRAGE, SA26,568$333
MILLENNIUM MANAGEMENT LLC22,748$285
Kovack Advisors, Inc.22,000$276
Centiva Capital, LP21,815$274
Hudson Bay Capital Management LP21,553$270
OCCUDO QUANTITATIVE STRATEGIES LP21,293$267
AMERICAN CENTURY COMPANIES INC20,666$259
VILLERE ST DENIS J & CO LLC20,000$251
Squarepoint Ops LLC16,677$209
OMERS ADMINISTRATION Corp16,600$208
Ancora Advisors LLC16,247$204
Sowell Financial Services LLC16,156$203
JAMES INVESTMENT RESEARCH INC14,600$183
NewEdge Advisors, LLC14,600$183
MORGAN STANLEY13,211$166
BARCLAYS PLC12,698$159
Graham Capital Management, L.P.12,608$158
LPL Financial LLC11,993$151
WealthTrust Axiom LLC11,300$142
UBS Group AG9,810$123
GROUP ONE TRADING, L.P.7,549$95
Kestra Advisory Services, LLC7,050$88
CITIGROUP INC2,388$30
SIMPLEX TRADING, LLC681$9
OSAIC HOLDINGS, INC.645$8
Strengthening Families & Communities, LLC490$6
FMR LLC428$5
SBI Securities Co., Ltd.130$2
BANK OF AMERICA CORP /DE/78$1
ROYAL BANK OF CANADA46$1
Total (65 institutions)6,148,706$73,437