AXCELIS TECHNOLOGIES INC

Ticker: ACLS CUSIP: 054540208 Class: EQTY

DIMENSIONAL FUND ADVISORS LP's Holding History (CIK: 0000354204)

Note: Option positions (PUT/CALL) are excluded.

Q4 2025
Shares 841,040 Value ($000) $67,570 Avg Close $83.73 Range $73.60 - $98.35
Q3 2025
Shares 769,612 Value ($000) $75,143 Avg Close $80.54 Range $65.64 - $102.93
Q2 2025
Shares 735,459 Value ($000) $51,255 Avg Close $57.05 Range $40.40 - $73.57
Q1 2025
Shares 701,275 Value ($000) $34,831 Avg Close $63.23 Range $47.23 - $76.94
Q4 2024
Shares 724,585 Value ($000) $50,628 Avg Close $83.05 Range $68.23 - $107.23
Q3 2024
Shares 652,954 Value ($000) $68,466 Avg Close $116.95 Range $95.62 - $158.61
Q2 2024
Shares 658,112 Value ($000) $93,575 Avg Close $115.29 Range $93.77 - $145.70
Q1 2024
Shares 676,645 Value ($000) $75,459 Avg Close $119.16 Range $106.11 - $145.77
Q4 2023
Shares 691,317 Value ($000) $89,661 Avg Close $137.83 Range $120.54 - $170.97
Q3 2023
Shares 940,633 Value ($000) $153,371 Avg Close $175.88 Range $152.71 - $201.00
Q2 2023
Shares 941,079 Value ($000) $172,524 Avg Close $143.96 Range $105.28 - $186.68
Q1 2023
Shares 1,027,607 Value ($000) $136,930 Avg Close $117.49 Range $76.97 - $136.38
Q4 2022
Shares 1,385,592 Value ($000) $110 Avg Close $70.45 Range $49.78 - $88.73
Q3 2022
Shares 1,403,763 Value ($000) $85,016 Avg Close $64.60 Range $46.41 - $83.39
Q2 2022
Shares 1,486,918 Value ($000) $81,541 Avg Close $57.95 Range $50.69 - $77.20
Q1 2022
Shares 1,557,346 Value ($000) $117,629 Avg Close $68.31 Range $54.20 - $83.74
Q4 2021
Shares 1,575,504 Value ($000) $117,467 Avg Close $59.25 Range $45.14 - $75.40
Q3 2021
Shares 1,609,109 Value ($000) $75,676 Avg Close $43.50 Range $33.36 - $52.80
Q2 2021
Shares 1,602,933 Value ($000) $64,791 Avg Close $41.43 Range $35.45 - $50.21
Q1 2021
Shares 1,640,218 Value ($000) $67,391 Avg Close $37.29 Range $28.45 - $44.20
Q4 2020
Shares 1,719,362 Value ($000) $50,068 Avg Close $25.87 Range $21.69 - $30.05
Q3 2020
Shares 1,784,888 Value ($000) $39,268 Avg Close $25.50 Range $20.40 - $31.50
Q2 2020
Shares 1,942,331 Value ($000) $54,091 Avg Close $24.39 Range $16.11 - $28.84
Q1 2020
Shares 2,124,688 Value ($000) $38,902 Avg Close $23.24 Range $12.99 - $29.24
Q4 2019
Shares 2,350,858 Value ($000) $56,644 Avg Close $21.07 Range $16.13 - $25.00
Q3 2019
Shares 2,389,899 Value ($000) $40,843 Avg Close $15.98 Range $14.53 - $18.82
Q2 2019
Shares 2,389,497 Value ($000) $35,962 Avg Close $17.86 Range $13.99 - $22.19
Q1 2019
Shares 2,382,070 Value ($000) $47,927 Avg Close $20.31 Range $16.55 - $22.99
Q4 2018
Shares 2,285,935 Value ($000) $40,690 Avg Close $17.77 Range $15.46 - $20.57
Q3 2018
Shares 2,077,672 Value ($000) $40,826 Avg Close $20.60 Range $18.35 - $25.17
Q2 2018
Shares 1,955,604 Value ($000) $38,721 Avg Close $21.99 Range $19.30 - $25.20
Q1 2018
Shares 1,850,496 Value ($000) $45,522 Avg Close $26.28 Range $21.90 - $31.60
Q4 2017
Shares 1,829,605 Value ($000) $52,512 Avg Close $31.47 Range $27.15 - $37.05
Q3 2017
Shares 1,835,551 Value ($000) $50,201 Avg Close $22.14 Range $18.60 - $27.40
Q2 2017
Shares 1,809,984 Value ($000) $37,920 Avg Close $21.13 Range $17.65 - $26.53
Q1 2017
Shares 1,766,009 Value ($000) $33,200 Avg Close $15.74 Range $14.00 - $18.90
Q4 2016
Shares 1,602,993 Value ($000) $23,323 Avg Close $13.61 Range $11.05 - $14.68
Q3 2016
Shares 1,520,550 Value ($000) $20,193 Avg Close $11.60 Range $9.68 - $13.47