AXCELIS TECHNOLOGIES INC

Ticker: ACLS CUSIP: 054540208 Class: EQTY

Note: Option positions (PUT/CALL) are excluded.

InstitutionSharesValue ($000)
BlackRock, Inc.4,827,575$387,847
VANGUARD GROUP INC4,122,529$331,204
VICTORY CAPITAL MANAGEMENT INC1,807,404$145,207
REINHART PARTNERS, LLC.1,589,898$127,734
AMERICAN CENTURY COMPANIES INC1,233,646$99,111
STATE STREET CORP1,186,227$95,301
BNP Paribas Investment Partners S.A.1,091,094$88
GEODE CAPITAL MANAGEMENT, LLC917,747$73,742
DIMENSIONAL FUND ADVISORS LP841,040$67,570
PRIMECAP MANAGEMENT CO/CA/664,942$53,421
GOLDMAN SACHS GROUP INC629,814$50,599
FMR LLC610,603$49,056
Invesco Ltd.478,897$38,475
D. E. Shaw & Co., Inc.470,285$37,783
CHARLES SCHWAB INVESTMENT MANAGEMENT INC431,195$34,642
LSV ASSET MANAGEMENT429,500$35
Boston Trust Walden Corp427,736$34,364
Boston Partners422,435$35,066
NORTHERN TRUST CORP405,146$32,549
PRICE T ROWE ASSOCIATES INC /MD/383,056$31
JPMORGAN CHASE & CO357,502$28,722
MORGAN STANLEY350,220$28,137
Grantham, Mayo, Van Otterloo & Co. LLC322,849$25,938
FEDERATED HERMES, INC.276,266$22,195
Allspring Global Investments Holdings, LLC266,015$22,909
BALYASNY ASSET MANAGEMENT L.P.243,503$19,563
VOLORIDGE INVESTMENT MANAGEMENT, LLC220,713$17,732
UBS Group AG213,388$17,144
ARROWSTREET CAPITAL, LIMITED PARTNERSHIP212,050$17,036
KENNEDY CAPITAL MANAGEMENT LLC205,737$16,529
Bank of New York Mellon Corp203,536$16,352
PRINCIPAL FINANCIAL GROUP INC200,025$16,070
CITADEL ADVISORS LLC176,047$14,144
BNP PARIBAS ARBITRAGE, SA164,027$13,178
Squarepoint Ops LLC153,703$12,348
First Eagle Investment Management, LLC136,318$10,952
MILLENNIUM MANAGEMENT LLC130,090$10,451
Public Sector Pension Investment Board129,777$10,426
BANK OF AMERICA CORP /DE/118,206$9,497
ROYCE & ASSOCIATES LP116,375$9,350
CITIGROUP INC110,470$8,875
Clark Capital Management Group, Inc.110,294$8,861
SEGALL BRYANT & HAMILL, LLC102,187$8,210
BlackBarn Capital Partners LP96,573$7,759
FIRST TRUST ADVISORS LP88,396$7,102
NORGES BANK88,147$7,082
RHUMBLINE ADVISERS88,109$7,079
ZACKS INVESTMENT MANAGEMENT88,080$7,076
AMERIPRISE FINANCIAL INC86,057$6,914
WELLS FARGO & COMPANY/MN79,752$6,407
JANE STREET GROUP, LLC79,049$6,351
Legal & General Group Plc78,055$6,271
BARCLAYS PLC75,982$6,104
Creative Planning73,500$5,905
TWO SIGMA INVESTMENTS, LP71,244$5,724
Nuveen, LLC70,393$5,655
Susquehanna Portfolio Strategies, LLC68,213$5,480
RENAISSANCE TECHNOLOGIES LLC66,899$5,375
Swiss National Bank61,200$4,917
UBS ASSET MANAGEMENT AMERICAS INC61,097$4,909
PARADIGM CAPITAL MANAGEMENT INC/NY56,000$4,499
GLOBEFLEX CAPITAL L P55,997$4,499
QSM Asset Management Ltd53,166$4,271
ENVESTNET ASSET MANAGEMENT INC52,497$4,218
STATE OF WISCONSIN INVESTMENT BOARD50,506$4,058
Soviero Asset Management, LP46,000$3,696
HARBOR CAPITAL ADVISORS, INC.44,687$4
JANUS HENDERSON GROUP PLC41,776$3,355
ISTHMUS PARTNERS, LLC41,480$3,333
OSSIAM40,700$3,270
INTECH INVESTMENT MANAGEMENT LLC40,463$3,251
F/M Investments LLC40,294$3,237
PRUDENTIAL FINANCIAL INC39,565$3,179
Private Advisor Group, LLC38,482$3,092
BESSEMER GROUP INC37,972$3
AQR CAPITAL MANAGEMENT LLC37,581$3,019
Amundi37,274$2,995
BRIDGEWAY CAPITAL MANAGEMENT, LLC36,000$2,892
LPL Financial LLC34,574$2,778
ALLIANCEBERNSTEIN L.P.34,246$2,751
FRANKLIN RESOURCES INC33,248$2,671
CALIFORNIA STATE TEACHERS RETIREMENT SYSTEM30,030$2,413
Mitsubishi UFJ Kokusai Asset Management Co., Ltd.29,121$2,508
BRIDGES INVESTMENT MANAGEMENT INC28,400$2,282
SEI INVESTMENTS CO27,976$2,248
AlphaQuest LLC26,367$2,118
GREAT WEST LIFE ASSURANCE CO /CAN/26,302$2
DEUTSCHE BANK AG\25,920$2,082
ALGERT GLOBAL LLC25,340$2
ABN AMRO INVESTMENT SOLUTIONS24,798$1,992
BURNEY CO/24,721$1,986
STIFEL FINANCIAL CORP24,347$1,956
Aquatic Capital Management LLC22,642$1,819
State of Alaska, Department of Revenue22,568$2
Elo Mutual Pension Insurance Co22,446$1,803
Janney Montgomery Scott LLC22,436$2
Jackson Creek Investment Advisors LLC22,054$2
Thrivent Financial for Lutherans21,301$2
Schonfeld Strategic Advisors LLC21,182$1,702
Verition Fund Management LLC21,177$1,701
267 other institutions1,130,143$81,206
Total (367 institutions)31,302,592$2,337,448