AXCELIS TECHNOLOGIES INC

Ticker: ACLS CUSIP: 054540208 Class: EQTY

MERCER GLOBAL ADVISORS INC /ADV's Holding History (CIK: 0000853758)

Note: Option positions (PUT/CALL) are excluded.

Q4 2025

Shares 3,721 Value ($000) $299 Avg Close $83.73 Range $73.60 - $98.35

Q3 2025

Shares 2,770 Value ($000) $270 Avg Close $80.54 Range $65.64 - $102.93

Q1 2023

Shares 2,236 Value ($000) $0 Avg Close $117.49 Range $76.97 - $136.38

Period	Shares	Value ($000)	Average Close	Price Range
Q4 2025	3,721	$299	$83.73	$73.60 - $98.35
Q3 2025	2,770	$270	$80.54	$65.64 - $102.93
Q1 2023	2,236	$0	$117.49	$76.97 - $136.38