AXCELIS TECHNOLOGIES INC

Ticker: ACLS CUSIP: 054540208 Class: EQTY

KENNEDY CAPITAL MANAGEMENT LLC's Holding History (CIK: 0000884589)

Note: Option positions (PUT/CALL) are excluded.

Q4 2025

Shares 205,737 Value ($000) $16,529 Avg Close $83.73 Range $73.60 - $98.35

Q3 2025

Shares 183,100 Value ($000) $17,878 Avg Close $80.54 Range $65.64 - $102.93

Q2 2025

Shares 133,206 Value ($000) $9,283 Avg Close $57.05 Range $40.40 - $73.57

Q1 2025

Shares 129,881 Value ($000) $6,451 Avg Close $63.23 Range $47.23 - $76.94

Q4 2024

Shares 53,881 Value ($000) $3,765 Avg Close $83.05 Range $68.23 - $107.23

Q3 2024

Shares 86,914 Value ($000) $9,113 Avg Close $116.95 Range $95.62 - $158.61

Q2 2024

Shares 105,028 Value ($000) $14,934 Avg Close $115.29 Range $93.77 - $145.70

Q1 2024

Shares 82,010 Value ($000) $9,146 Avg Close $119.16 Range $106.11 - $145.77

Q4 2023

Shares 5,007 Value ($000) $649 Avg Close $137.83 Range $120.54 - $170.97

Q3 2023

Shares 20,266 Value ($000) $3,304 Avg Close $175.88 Range $152.71 - $201.00

Q2 2023

Shares 25,077 Value ($000) $4,597 Avg Close $143.96 Range $105.28 - $186.68

Q1 2023

Shares 62,644 Value ($000) $8,347 Avg Close $117.49 Range $76.97 - $136.38

Q4 2022

Shares 92,415 Value ($000) $7,334 Avg Close $70.45 Range $49.78 - $88.73

Q3 2022

Shares 102,459 Value ($000) $6,205 Avg Close $64.60 Range $46.41 - $83.39

Q2 2022

Shares 137,541 Value ($000) $7,543 Avg Close $57.95 Range $50.69 - $77.20

Q1 2022

Shares 125,073 Value ($000) $9,447 Avg Close $68.31 Range $54.20 - $83.74

Q4 2021

Shares 146,906 Value ($000) $10,953 Avg Close $59.25 Range $45.14 - $75.40

Q3 2021

Shares 149,566 Value ($000) $7,034 Avg Close $43.50 Range $33.36 - $52.80

Q2 2021

Shares 162,511 Value ($000) $6,569 Avg Close $41.43 Range $35.45 - $50.21

Q1 2021

Shares 193,751 Value ($000) $7,961 Avg Close $37.29 Range $28.45 - $44.20

Q4 2020

Shares 220,240 Value ($000) $6,413 Avg Close $25.87 Range $21.69 - $30.05

Q3 2020

Shares 110,726 Value ($000) $2,436 Avg Close $25.50 Range $20.40 - $31.50

Q2 2020

Shares 125,368 Value ($000) $3,491 Avg Close $24.39 Range $16.11 - $28.84

Q1 2020

Shares 258,611 Value ($000) $4,735 Avg Close $23.24 Range $12.99 - $29.24

Q4 2019

Shares 247,645 Value ($000) $5,967 Avg Close $21.07 Range $16.13 - $25.00

Q3 2019

Shares 195,464 Value ($000) $3,340 Avg Close $15.98 Range $14.53 - $18.82

Q1 2018

Shares 90,857 Value ($000) $2,235 Avg Close $26.28 Range $21.90 - $31.60

Q4 2017

Shares 99,145 Value ($000) $2,845 Avg Close $31.47 Range $27.15 - $37.05

Q3 2017

Shares 144,035 Value ($000) $3,939 Avg Close $22.14 Range $18.60 - $27.40

Q2 2017

Shares 146,890 Value ($000) $3,077 Avg Close $21.13 Range $17.65 - $26.53

Q1 2017

Shares 151,371 Value ($000) $2,846 Avg Close $15.74 Range $14.00 - $18.90

Q4 2016

Shares 218,629 Value ($000) $3,181 Avg Close $13.61 Range $11.05 - $14.68

Q3 2016

Shares 228,636 Value ($000) $3,036 Avg Close $11.60 Range $9.68 - $13.47

Q2 2016

Shares 1,393,809 Value ($000) $3,749 Avg Close $10.72 Range $8.92 - $11.92

Period	Shares	Value ($000)	Average Close	Price Range
Q4 2025	205,737	$16,529	$83.73	$73.60 - $98.35
Q3 2025	183,100	$17,878	$80.54	$65.64 - $102.93
Q2 2025	133,206	$9,283	$57.05	$40.40 - $73.57
Q1 2025	129,881	$6,451	$63.23	$47.23 - $76.94
Q4 2024	53,881	$3,765	$83.05	$68.23 - $107.23
Q3 2024	86,914	$9,113	$116.95	$95.62 - $158.61
Q2 2024	105,028	$14,934	$115.29	$93.77 - $145.70
Q1 2024	82,010	$9,146	$119.16	$106.11 - $145.77
Q4 2023	5,007	$649	$137.83	$120.54 - $170.97
Q3 2023	20,266	$3,304	$175.88	$152.71 - $201.00
Q2 2023	25,077	$4,597	$143.96	$105.28 - $186.68
Q1 2023	62,644	$8,347	$117.49	$76.97 - $136.38
Q4 2022	92,415	$7,334	$70.45	$49.78 - $88.73
Q3 2022	102,459	$6,205	$64.60	$46.41 - $83.39
Q2 2022	137,541	$7,543	$57.95	$50.69 - $77.20
Q1 2022	125,073	$9,447	$68.31	$54.20 - $83.74
Q4 2021	146,906	$10,953	$59.25	$45.14 - $75.40
Q3 2021	149,566	$7,034	$43.50	$33.36 - $52.80
Q2 2021	162,511	$6,569	$41.43	$35.45 - $50.21
Q1 2021	193,751	$7,961	$37.29	$28.45 - $44.20
Q4 2020	220,240	$6,413	$25.87	$21.69 - $30.05
Q3 2020	110,726	$2,436	$25.50	$20.40 - $31.50
Q2 2020	125,368	$3,491	$24.39	$16.11 - $28.84
Q1 2020	258,611	$4,735	$23.24	$12.99 - $29.24
Q4 2019	247,645	$5,967	$21.07	$16.13 - $25.00
Q3 2019	195,464	$3,340	$15.98	$14.53 - $18.82
Q1 2018	90,857	$2,235	$26.28	$21.90 - $31.60
Q4 2017	99,145	$2,845	$31.47	$27.15 - $37.05
Q3 2017	144,035	$3,939	$22.14	$18.60 - $27.40
Q2 2017	146,890	$3,077	$21.13	$17.65 - $26.53
Q1 2017	151,371	$2,846	$15.74	$14.00 - $18.90
Q4 2016	218,629	$3,181	$13.61	$11.05 - $14.68
Q3 2016	228,636	$3,036	$11.60	$9.68 - $13.47
Q2 2016	1,393,809	$3,749	$10.72	$8.92 - $11.92