AXCELIS TECHNOLOGIES INC

Ticker: ACLS CUSIP: 054540208 Class: EQTY

MASSACHUSETTS FINANCIAL SERVICES CO /MA/'s Holding History (CIK: 0000912938)

Note: Option positions (PUT/CALL) are excluded.

Q4 2024

Shares 233,008 Value ($000) $16,280 Avg Close $83.05 Range $68.23 - $107.23

Q3 2024

Shares 231,868 Value ($000) $24,311 Avg Close $116.95 Range $95.62 - $158.61

Q2 2024

Shares 238,221 Value ($000) $33,873 Avg Close $115.29 Range $93.77 - $145.70

Q1 2024

Shares 217,637 Value ($000) $24,271 Avg Close $119.16 Range $106.11 - $145.77

Period	Shares	Value ($000)	Average Close	Price Range
Q4 2024	233,008	$16,280	$83.05	$68.23 - $107.23
Q3 2024	231,868	$24,311	$116.95	$95.62 - $158.61
Q2 2024	238,221	$33,873	$115.29	$93.77 - $145.70
Q1 2024	217,637	$24,271	$119.16	$106.11 - $145.77