AXCELIS TECHNOLOGIES INC

Ticker: ACLS CUSIP: 054540208 Class: EQTY

ARROWSTREET CAPITAL, LIMITED PARTNERSHIP's Holding History (CIK: 0001164508)

Note: Option positions (PUT/CALL) are excluded.

Q4 2025

Shares 212,050 Value ($000) $17,036 Avg Close $83.73 Range $73.60 - $98.35

Q3 2025

Shares 117,797 Value ($000) $11,502 Avg Close $80.54 Range $65.64 - $102.93

Q1 2024

Shares 206,128 Value ($000) $23 Avg Close $119.16 Range $106.11 - $145.77

Q4 2023

Shares 341,597 Value ($000) $44 Avg Close $137.83 Range $120.54 - $170.97

Q3 2023

Shares 529,807 Value ($000) $86 Avg Close $175.88 Range $152.71 - $201.00

Q2 2023

Shares 616,433 Value ($000) $113 Avg Close $143.96 Range $105.28 - $186.68

Q1 2023

Shares 607,829 Value ($000) $81 Avg Close $117.49 Range $76.97 - $136.38

Q4 2022

Shares 321,634 Value ($000) $26 Avg Close $70.45 Range $49.78 - $88.73

Q3 2022

Shares 275,111 Value ($000) $16,661 Avg Close $64.60 Range $46.41 - $83.39

Q2 2022

Shares 259,228 Value ($000) $14,216 Avg Close $57.95 Range $50.69 - $77.20

Q1 2022

Shares 94,988 Value ($000) $7,174 Avg Close $68.31 Range $54.20 - $83.74

Q4 2021

Shares 195,262 Value ($000) $14,559 Avg Close $59.25 Range $45.14 - $75.40

Q3 2021

Shares 347,966 Value ($000) $16,365 Avg Close $43.50 Range $33.36 - $52.80

Q2 2021

Shares 381,792 Value ($000) $15,432 Avg Close $41.43 Range $35.45 - $50.21

Q1 2021

Shares 390,092 Value ($000) $16,029 Avg Close $37.29 Range $28.45 - $44.20

Q4 2020

Shares 418,792 Value ($000) $12,195 Avg Close $25.87 Range $21.69 - $30.05

Q3 2020

Shares 401,350 Value ($000) $8,830 Avg Close $25.50 Range $20.40 - $31.50

Q2 2020

Shares 341,487 Value ($000) $9,510 Avg Close $24.39 Range $16.11 - $28.84

Q1 2020

Shares 203,615 Value ($000) $3,728 Avg Close $23.24 Range $12.99 - $29.24

Q4 2019

Shares 232,159 Value ($000) $5,594 Avg Close $21.07 Range $16.13 - $25.00

Q3 2019

Shares 95,237 Value ($000) $1,628 Avg Close $15.98 Range $14.53 - $18.82

Q1 2019

Shares 52,564 Value ($000) $1,058 Avg Close $20.31 Range $16.55 - $22.99

Q1 2018

Shares 10,900 Value ($000) $268 Avg Close $26.28 Range $21.90 - $31.60

Q3 2017

Shares 54,500 Value ($000) $1,491 Avg Close $22.14 Range $18.60 - $27.40

Q1 2017

Shares 28,100 Value ($000) $528 Avg Close $15.74 Range $14.00 - $18.90

Period	Shares	Value ($000)	Average Close	Price Range
Q4 2025	212,050	$17,036	$83.73	$73.60 - $98.35
Q3 2025	117,797	$11,502	$80.54	$65.64 - $102.93
Q1 2024	206,128	$23	$119.16	$106.11 - $145.77
Q4 2023	341,597	$44	$137.83	$120.54 - $170.97
Q3 2023	529,807	$86	$175.88	$152.71 - $201.00
Q2 2023	616,433	$113	$143.96	$105.28 - $186.68
Q1 2023	607,829	$81	$117.49	$76.97 - $136.38
Q4 2022	321,634	$26	$70.45	$49.78 - $88.73
Q3 2022	275,111	$16,661	$64.60	$46.41 - $83.39
Q2 2022	259,228	$14,216	$57.95	$50.69 - $77.20
Q1 2022	94,988	$7,174	$68.31	$54.20 - $83.74
Q4 2021	195,262	$14,559	$59.25	$45.14 - $75.40
Q3 2021	347,966	$16,365	$43.50	$33.36 - $52.80
Q2 2021	381,792	$15,432	$41.43	$35.45 - $50.21
Q1 2021	390,092	$16,029	$37.29	$28.45 - $44.20
Q4 2020	418,792	$12,195	$25.87	$21.69 - $30.05
Q3 2020	401,350	$8,830	$25.50	$20.40 - $31.50
Q2 2020	341,487	$9,510	$24.39	$16.11 - $28.84
Q1 2020	203,615	$3,728	$23.24	$12.99 - $29.24
Q4 2019	232,159	$5,594	$21.07	$16.13 - $25.00
Q3 2019	95,237	$1,628	$15.98	$14.53 - $18.82
Q1 2019	52,564	$1,058	$20.31	$16.55 - $22.99
Q1 2018	10,900	$268	$26.28	$21.90 - $31.60
Q3 2017	54,500	$1,491	$22.14	$18.60 - $27.40
Q1 2017	28,100	$528	$15.74	$14.00 - $18.90