AXCELIS TECHNOLOGIES INC

Ticker: ACLS CUSIP: 054540208 Class: EQTY

Calamos Advisors LLC's Holding History (CIK: 0001316507)

Note: Option positions (PUT/CALL) are excluded.

Q3 2023

Shares 14,274 Value ($000) $2,327 Avg Close $175.88 Range $152.71 - $201.00

Q2 2023

Shares 14,278 Value ($000) $2,618 Avg Close $143.96 Range $105.28 - $186.68

Q1 2023

Shares 5,532 Value ($000) $737 Avg Close $117.49 Range $76.97 - $136.38

Period	Shares	Value ($000)	Average Close	Price Range
Q3 2023	14,274	$2,327	$175.88	$152.71 - $201.00
Q2 2023	14,278	$2,618	$143.96	$105.28 - $186.68
Q1 2023	5,532	$737	$117.49	$76.97 - $136.38