AXCELIS TECHNOLOGIES INC

Ticker: ACLS CUSIP: 054540208 Class: EQTY

Robeco Institutional Asset Management B.V.'s Holding History (CIK: 0001418773)

Note: Option positions (PUT/CALL) are excluded.

Q4 2023

Shares 10,249 Value ($000) $1,329 Avg Close $137.83 Range $120.54 - $170.97

Q3 2023

Shares 11,323 Value ($000) $1,846 Avg Close $175.88 Range $152.71 - $201.00

Q2 2023

Shares 11,503 Value ($000) $2,109 Avg Close $143.96 Range $105.28 - $186.68

Q1 2023

Shares 12,689 Value ($000) $1,691 Avg Close $117.49 Range $76.97 - $136.38

Q4 2022

Shares 14,853 Value ($000) $1,179 Avg Close $70.45 Range $49.78 - $88.73

Q3 2022

Shares 26,420 Value ($000) $1,600 Avg Close $64.60 Range $46.41 - $83.39

Q2 2022

Shares 11,129 Value ($000) $610 Avg Close $57.95 Range $50.69 - $77.20

Q1 2022

Shares 5,177 Value ($000) $391 Avg Close $68.31 Range $54.20 - $83.74

Period	Shares	Value ($000)	Average Close	Price Range
Q4 2023	10,249	$1,329	$137.83	$120.54 - $170.97
Q3 2023	11,323	$1,846	$175.88	$152.71 - $201.00
Q2 2023	11,503	$2,109	$143.96	$105.28 - $186.68
Q1 2023	12,689	$1,691	$117.49	$76.97 - $136.38
Q4 2022	14,853	$1,179	$70.45	$49.78 - $88.73
Q3 2022	26,420	$1,600	$64.60	$46.41 - $83.39
Q2 2022	11,129	$610	$57.95	$50.69 - $77.20
Q1 2022	5,177	$391	$68.31	$54.20 - $83.74