AXCELIS TECHNOLOGIES INC

Ticker: ACLS CUSIP: 054540208 Class: EQTY

Virtus ETF Advisers LLC's Holding History (CIK: 0001587281)

Note: Option positions (PUT/CALL) are excluded.

Q4 2025

Shares 2,221 Value ($000) $178 Avg Close $83.73 Range $73.60 - $98.35

Q3 2025

Shares 2,221 Value ($000) $217 Avg Close $80.54 Range $65.64 - $102.93

Q2 2025

Shares 1,670 Value ($000) $116 Avg Close $57.05 Range $40.40 - $73.57

Period	Shares	Value ($000)	Average Close	Price Range
Q4 2025	2,221	$178	$83.73	$73.60 - $98.35
Q3 2025	2,221	$217	$80.54	$65.64 - $102.93
Q2 2025	1,670	$116	$57.05	$40.40 - $73.57