| BlackRock, Inc. | 19,461,349 | $228,865 |
| VANGUARD GROUP INC | 13,828,355 | $162,621 |
| First Light Asset Management, LLC | 10,035,063 | $118,012 |
| Greenhouse Funds LLLP | 8,643,846 | $101,652 |
| D. E. Shaw & Co., Inc. | 5,297,528 | $62,299 |
| MILLENNIUM MANAGEMENT LLC | 5,204,409 | $61,204 |
| STATE STREET CORP | 4,978,292 | $58,545 |
| BRAIDWELL LP | 4,632,801 | $54,482 |
| SCHRODER INVESTMENT MANAGEMENT GROUP | 4,017,588 | $49,135 |
| NOMURA ASSET MANAGEMENT INTERNATIONAL INC. | 3,939,140 | $46,324 |
| GEODE CAPITAL MANAGEMENT, LLC | 3,176,644 | $37,364 |
| DRIEHAUS CAPITAL MANAGEMENT LLC | 2,471,738 | $29,068 |
| DIMENSIONAL FUND ADVISORS LP | 2,448,747 | $28,801 |
| AMERICAN CAPITAL MANAGEMENT INC | 2,324,366 | $27,335 |
| GW&K Investment Management, LLC | 2,238,767 | $26 |
| MORGAN STANLEY | 2,126,049 | $25,002 |
| abrdn plc | 1,798,939 | $21,156 |
| SEGALL BRYANT & HAMILL, LLC | 1,732,029 | $20,369 |
| PFM Health Sciences, LP | 1,694,051 | $19,922 |
| LOOMIS SAYLES & CO L P | 1,631,135 | $19,182 |
| GOLDMAN SACHS GROUP INC | 1,433,130 | $16,854 |
| NORTHERN TRUST CORP | 1,423,088 | $16,736 |
| GLENMEDE TRUST CO NA | 1,410,835 | $16,591 |
| SAMLYN CAPITAL, LLC | 1,388,221 | $16,325 |
| BANK OF AMERICA CORP /DE/ | 1,347,726 | $15,849 |
| CITADEL ADVISORS LLC | 1,307,471 | $15,376 |
| CHARLES SCHWAB INVESTMENT MANAGEMENT INC | 1,217,152 | $14,314 |
| T. Rowe Price Investment Management, Inc. | 898,787 | $11 |
| Trexquant Investment LP | 885,530 | $10,414 |
| Connor, Clark & Lunn Investment Management Ltd. | 877,949 | $10,325 |
| Bank of New York Mellon Corp | 740,017 | $8,703 |
| PRINCIPAL FINANCIAL GROUP INC | 616,909 | $7,255 |
| VOLORIDGE INVESTMENT MANAGEMENT, LLC | 593,790 | $6,983 |
| JPMORGAN CHASE & CO | 584,035 | $6,868 |
| HighMark Wealth Management LLC | 567,334 | $6,672 |
| Invesco Ltd. | 539,157 | $6,340 |
| Public Sector Pension Investment Board | 447,703 | $5,265 |
| Soleus Capital Management, L.P. | 427,504 | $5,027 |
| AMERIPRISE FINANCIAL INC | 426,211 | $5,012 |
| Nuveen, LLC | 423,593 | $4,981 |
| RHUMBLINE ADVISERS | 357,256 | $4,201 |
| UBS ASSET MANAGEMENT AMERICAS INC | 350,847 | $4,126 |
| UBS Group AG | 347,574 | $4,087 |
| Legal & General Group Plc | 324,189 | $3,812 |
| SG Americas Securities, LLC | 314,371 | $4 |
| Samjo Management, LLC | 285,300 | $3,355 |
| Voya Investment Management LLC | 284,886 | $3,350 |
| Bellevue Group AG | 278,286 | $3,273 |
| STATE OF WISCONSIN INVESTMENT BOARD | 270,541 | $3,182 |
| Swiss National Bank | 254,700 | $2,995 |
| Bullseye Asset Management LLC | 236,860 | $3 |
| BARCLAYS PLC | 225,178 | $2,648 |
| Allianz Asset Management GmbH | 213,356 | $2,509 |
| TWO SIGMA INVESTMENTS, LP | 170,900 | $2,010 |
| FMR LLC | 170,487 | $2,005 |
| SILVERBACK ASSET MANAGEMENT LLC | 165,101 | $1,942 |
| FEDERATED HERMES, INC. | 164,148 | $1,930 |
| NEW YORK STATE TEACHERS RETIREMENT SYSTEM | 161,580 | $2 |
| WELLS FARGO & COMPANY/MN | 158,446 | $1,863 |
| TUDOR INVESTMENT CORP ET AL | 156,642 | $1,842 |
| ALLIANCEBERNSTEIN L.P. | 156,254 | $1,838 |
| WHITE PINE CAPITAL LLC | 155,181 | $1,825 |
| AQR CAPITAL MANAGEMENT LLC | 146,352 | $1,721 |
| PERKINS CAPITAL MANAGEMENT INC | 141,850 | $1,668 |
| Universal- Beteiligungs- und Servicegesellschaft mbH | 132,882 | $1,563 |
| PRUDENTIAL FINANCIAL INC | 124,225 | $1,461 |
| PRICE T ROWE ASSOCIATES INC /MD/ | 123,930 | $1 |
| CALIFORNIA STATE TEACHERS RETIREMENT SYSTEM | 123,783 | $1,456 |
| DARK FOREST CAPITAL MANAGEMENT LP | 121,265 | $1,426 |
| GABELLI FUNDS LLC | 119,000 | $1,399 |
| JANE STREET GROUP, LLC | 114,016 | $1,341 |
| BNP PARIBAS ARBITRAGE, SA | 112,968 | $1,329 |
| SEI INVESTMENTS CO | 110,820 | $1,303 |
| GREAT WEST LIFE ASSURANCE CO /CAN/ | 106,132 | $1 |
| DEUTSCHE BANK AG\ | 104,781 | $1,232 |
| Divisadero Street Capital Management, LP | 100,000 | $1,176 |
| Lighthouse Investment Partners, LLC | 99,630 | $1,172 |
| MOODY NATIONAL BANK TRUST DIVISION | 90,766 | $1,067 |
| Thrivent Financial for Lutherans | 88,906 | $1 |
| FRANKLIN RESOURCES INC | 85,689 | $1,008 |
| TWO SIGMA ADVISERS, LP | 83,600 | $983 |
| Y-Intercept (Hong Kong) Ltd | 83,525 | $982 |
| Curi Capital, LLC | 83,346 | $980 |
| State of Alaska, Department of Revenue | 73,044 | $1 |
| MetLife Investment Management, LLC | 71,734 | $844 |
| AMERICAN CENTURY COMPANIES INC | 71,289 | $838 |
| CHOREO, LLC | 61,462 | $752 |
| JANUS HENDERSON GROUP PLC | 60,110 | $707 |
| MIRAE ASSET GLOBAL ETFS HOLDINGS Ltd. | 59,910 | $705 |
| Louisiana State Employees Retirement System | 59,300 | $697 |
| GUIDANCE CAPITAL, INC | 55,869 | $725 |
| Creative Planning | 53,966 | $635 |
| Teton Advisors, LLC | 53,100 | $624 |
| State of Tennessee, Department of Treasury | 48,658 | $587 |
| BARD ASSOCIATES INC | 47,385 | $557 |
| Zurcher Kantonalbank (Zurich Cantonalbank) | 45,410 | $534 |
| EMERALD MUTUAL FUND ADVISERS TRUST | 44,919 | $528 |
| F/M Investments LLC | 44,919 | $528 |
| FULLER & THALER ASSET MANAGEMENT, INC. | 44,780 | $527 |
| INTECH INVESTMENT MANAGEMENT LLC | 44,703 | $526 |
| 156 other institutions | 1,821,868 | $20,179 |