ULTRATECH INC

CUSIP: 904034105 Class: COM

VANGUARD GROUP INC's Holding History (CIK: 0000102909)

Note: Option positions (PUT/CALL) are excluded.

Q1 2017
Shares 2,281,856 Value ($000) $67,589 Avg Close — Range —
Q4 2016
Shares 2,119,137 Value ($000) $50,817 Avg Close — Range —
Q3 2016
Shares 2,006,817 Value ($000) $46,317 Avg Close — Range —
Q2 2016
Shares 2,041,208 Value ($000) $46,887 Avg Close — Range —
Q1 2016
Shares 2,013,084 Value ($000) $43,966 Avg Close — Range —
Q4 2015
Shares 2,004,988 Value ($000) $39,739 Avg Close — Range —
Q3 2015
Shares 1,989,073 Value ($000) $31,865 Avg Close — Range —
Q2 2015
Shares 1,936,796 Value ($000) $35,947 Avg Close — Range —
Q1 2015
Shares 1,908,705 Value ($000) $33,096 Avg Close — Range —
Q4 2014
Shares 1,841,003 Value ($000) $34,168 Avg Close — Range —
Q3 2014
Shares 1,816,813 Value ($000) $41,332 Avg Close — Range —
Q2 2014
Shares 1,800,593 Value ($000) $39,937 Avg Close — Range —
Q1 2014
Shares 1,815,071 Value ($000) $52,982 Avg Close — Range —
Q4 2013
Shares 1,705,438 Value ($000) $49,458 Avg Close — Range —
Q3 2013
Shares 1,659,175 Value ($000) $50,273 Avg Close — Range —
Q2 2013
Shares 1,685,912 Value ($000) $61,907 Avg Close — Range —