ZYGO CORP

CUSIP: 989855101 Class: CMN

VANGUARD GROUP INC's Holding History (CIK: 0000102909)

Note: Option positions (PUT/CALL) are excluded.

Q1 2014
Shares 445,376 Value ($000) $6,766 Avg Close — Range —
Q4 2013
Shares 438,421 Value ($000) $6,480 Avg Close — Range —
Q3 2013
Shares 430,390 Value ($000) $6,878 Avg Close — Range —
Q2 2013
Shares 426,384 Value ($000) $6,742 Avg Close — Range —