| BlackRock, Inc. | 15,757,711 | $1,606,814 |
| VANGUARD GROUP INC | 15,704,206 | $1,601,358 |
| MILLENNIUM MANAGEMENT LLC | 6,133,892 | $625,473 |
| STATE STREET CORP | 4,971,626 | $506,957 |
| FRANKLIN RESOURCES INC | 4,667,858 | $475,981 |
| FMR LLC | 3,514,945 | $358,419 |
| Nuveen, LLC | 3,227,174 | $329,075 |
| GEODE CAPITAL MANAGEMENT, LLC | 3,125,289 | $318,752 |
| NEUBERGER BERMAN GROUP LLC | 2,702,238 | $275,547 |
| MASSACHUSETTS FINANCIAL SERVICES CO /MA/ | 2,596,392 | $264,754 |
| PRICE T ROWE ASSOCIATES INC /MD/ | 2,577,555 | $263 |
| NORGES BANK | 2,412,033 | $245,955 |
| BANK OF AMERICA CORP /DE/ | 2,388,050 | $243,509 |
| PointState Capital LP | 2,378,858 | $242,572 |
| MAIRS & POWER INC | 2,111,211 | $215,280 |
| CITADEL ADVISORS LLC | 2,084,590 | $212,566 |
| Bank of New York Mellon Corp | 1,949,761 | $198,817 |
| UBS Group AG | 1,874,713 | $191,164 |
| DIMENSIONAL FUND ADVISORS LP | 1,871,360 | $190,830 |
| Pictet Asset Management Holding SA | 1,696,550 | $172,997 |
| Clark Capital Management Group, Inc. | 1,657,362 | $169,001 |
| JOHNSON INVESTMENT COUNSEL INC | 1,584,100 | $161,531 |
| Point72 Asset Management, L.P. | 1,579,918 | $161,104 |
| Clean Energy Transition LLP | 1,506,140 | $153,581 |
| DEUTSCHE BANK AG\ | 1,430,142 | $145,832 |
| AMERIPRISE FINANCIAL INC | 1,421,109 | $144,911 |
| NORTHERN TRUST CORP | 1,412,120 | $143,994 |
| BALYASNY ASSET MANAGEMENT L.P. | 1,411,699 | $143,951 |
| Robeco Schweiz AG | 1,411,365 | $143,917 |
| MORGAN STANLEY | 1,409,585 | $143,736 |
| WILLIAM BLAIR INVESTMENT MANAGEMENT, LLC | 1,375,159 | $140,225 |
| Artemis Investment Management LLP | 1,354,701 | $138,139 |
| Merewether Investment Management, LP | 1,335,574 | $136,188 |
| FIRST TRUST ADVISORS LP | 1,277,130 | $130,229 |
| PRINCIPAL FINANCIAL GROUP INC | 1,244,957 | $126,956 |
| CONGRESS ASSET MANAGEMENT CO /MA | 1,156,999 | $117,979 |
| COMMERCE BANK | 1,112,915 | $113,484 |
| CHARLES SCHWAB INVESTMENT MANAGEMENT INC | 1,091,675 | $111,318 |
| GOLDMAN SACHS GROUP INC | 966,057 | $98,509 |
| UBS ASSET MANAGEMENT AMERICAS INC | 910,092 | $92,802 |
| JANE STREET GROUP, LLC | 842,528 | $85,913 |
| FEDERATED HERMES, INC. | 782,386 | $79,780 |
| Woodline Partners LP | 774,112 | $78,936 |
| Haverford Trust Co | 645,908 | $65,863 |
| Invesco Ltd. | 645,044 | $65,775 |
| ARIEL INVESTMENTS, LLC | 613,021 | $62,510 |
| Blackstone Inc. | 610,000 | $62,202 |
| Swedbank AB | 581,661 | $59,312 |
| PRIMECAP MANAGEMENT CO/CA/ | 573,850 | $58,515 |
| Gotham Asset Management, LLC | 570,862 | $58,211 |
| HM PAYSON & CO | 569,928 | $58,116 |
| Impax Asset Management Group plc | 553,268 | $56,417 |
| Man Group plc | 548,964 | $55,978 |
| ROYAL BANK OF CANADA | 546,742 | $55,751 |
| JPMORGAN CHASE & CO | 546,040 | $55,680 |
| Handelsbanken Fonder AB | 535,784 | $55 |
| Artisan Partners Limited Partnership | 530,702 | $54,116 |
| EVENTIDE ASSET MANAGEMENT, LLC | 514,890 | $52,551 |
| ENVESTNET ASSET MANAGEMENT INC | 514,777 | $52,492 |
| Ilex Capital Partners (UK) LLP | 503,037 | $51,295 |
| M&T Bank Corp | 479,423 | $48,887 |
| RAYMOND JAMES FINANCIAL INC | 473,631 | $48,296 |
| Squarepoint Ops LLC | 450,859 | $45,974 |
| Engineers Gate Manager LP | 450,366 | $45,924 |
| Amundi | 442,810 | $45,153 |
| Vontobel Holding Ltd. | 426,649 | $43,505 |
| RHUMBLINE ADVISERS | 415,964 | $42,416 |
| Qube Research & Technologies Ltd | 415,007 | $42,318 |
| WELLS FARGO & COMPANY/MN | 412,565 | $42,069 |
| FIL Ltd | 400,886 | $40,878 |
| TWO SIGMA INVESTMENTS, LP | 396,870 | $40,469 |
| ALLIANCEBERNSTEIN L.P. | 395,223 | $40,301 |
| Legal & General Group Plc | 393,996 | $40,176 |
| CIBC WORLD MARKETS CORP | 389,214 | $39,688 |
| Allianz Asset Management GmbH | 379,198 | $38,667 |
| Champlain Investment Partners, LLC | 378,372 | $38,583 |
| Retirement Systems of Alabama | 378,218 | $38,567 |
| Zimmer Partners, LP | 375,000 | $38,239 |
| PUBLIC EMPLOYEES RETIREMENT ASSOCIATION OF COLORADO | 328,915 | $34 |
| BARCLAYS PLC | 326,968 | $33,341 |
| JANUS HENDERSON GROUP PLC | 325,237 | $33,175 |
| Swiss National Bank | 317,287 | $32,354 |
| MUFG Securities EMEA plc | 310,000 | $31,611 |
| DekaBank Deutsche Girozentrale | 308,058 | $25 |
| BANK OF NOVA SCOTIA | 306,972 | $31,302 |
| Schonfeld Strategic Advisors LLC | 302,152 | $30,810 |
| NOMURA ASSET MANAGEMENT INTERNATIONAL INC. | 301,633 | $30,758 |
| NORDEA INVESTMENT MANAGEMENT AB | 298,175 | $30,664 |
| SG Americas Securities, LLC | 296,418 | $30 |
| Walleye Capital LLC | 293,535 | $29,932 |
| CALIFORNIA PUBLIC EMPLOYEES RETIREMENT SYSTEM | 290,018 | $29,573 |
| Copeland Capital Management, LLC | 282,078 | $28,763 |
| Interval Partners, LP | 271,975 | $27,733 |
| Focus Partners Wealth | 269,632 | $27,028 |
| CRAWFORD INVESTMENT COUNSEL INC | 253,971 | $25,897 |
| Cannell & Spears LLC | 248,969 | $25,387 |
| SCHRODER INVESTMENT MANAGEMENT GROUP | 248,939 | $25,384 |
| Rempart Asset Management Inc. | 248,450 | $25,334 |
| ARROWSTREET CAPITAL, LIMITED PARTNERSHIP | 217,691 | $22,198 |
| LPL Financial LLC | 217,429 | $22,171 |
| 638 other institutions | 13,851,053 | $1,269,992 |