| VANGUARD GROUP INC | 5,202,306 | $163,665 |
| FMR LLC | 4,653,111 | $146,387 |
| BlackRock, Inc. | 4,347,033 | $136,758 |
| ALLIANCEBERNSTEIN L.P. | 3,385,422 | $106,505 |
| BNP Paribas Investment Partners S.A. | 3,094,649 | $97 |
| MACKENZIE FINANCIAL CORP | 1,573,405 | $49,512 |
| Artisan Partners Limited Partnership | 1,520,700 | $47,841 |
| STATE STREET CORP | 1,489,029 | $46,845 |
| Champlain Investment Partners, LLC | 1,441,034 | $45,335 |
| Prosight Management, LP | 1,380,000 | $43,415 |
| ArrowMark Colorado Holdings LLC | 1,349,831 | $42,466 |
| GEODE CAPITAL MANAGEMENT, LLC | 1,328,514 | $41,803 |
| Chicago Capital, LLC | 1,190,995 | $37,469 |
| UBS Group AG | 1,052,944 | $33,126 |
| BAILLIE GIFFORD & CO | 1,015,978 | $31,963 |
| MORGAN STANLEY | 843,491 | $26,536 |
| PRICE T ROWE ASSOCIATES INC /MD/ | 705,740 | $22 |
| MIRAE ASSET GLOBAL ETFS HOLDINGS Ltd. | 699,971 | $22,021 |
| Rhenman & Partners Asset Management AB | 611,000 | $19,222 |
| NORTHERN TRUST CORP | 553,103 | $17,401 |
| GOLDMAN SACHS GROUP INC | 517,732 | $16,288 |
| Bellevue Group AG | 515,430 | $16,215 |
| CHARLES SCHWAB INVESTMENT MANAGEMENT INC | 462,373 | $14,546 |
| BANK OF AMERICA CORP /DE/ | 431,205 | $13,566 |
| WILLIAM BLAIR INVESTMENT MANAGEMENT, LLC | 416,243 | $13,095 |
| ADAGE CAPITAL PARTNERS GP, L.L.C. | 389,278 | $12,247 |
| T. Rowe Price Investment Management, Inc. | 385,548 | $12 |
| MILLENNIUM MANAGEMENT LLC | 383,137 | $12,053 |
| C WorldWide Group Holding A/S | 375,000 | $12 |
| JOHNSON & JOHNSON | 357,939 | $11,261 |
| JANUS HENDERSON GROUP PLC | 340,841 | $10,722 |
| NEW YORK STATE COMMON RETIREMENT FUND | 331,205 | $10,420 |
| Eagle Health Investments LP | 308,434 | $9,703 |
| Nuveen, LLC | 282,282 | $8,881 |
| Fiera Capital Corp | 276,494 | $8,699 |
| TWO SIGMA INVESTMENTS, LP | 266,476 | $8,383 |
| Granite Investment Partners, LLC | 265,633 | $8,357 |
| MASSACHUSETTS FINANCIAL SERVICES CO /MA/ | 263,227 | $8,281 |
| Portolan Capital Management, LLC | 255,118 | $8,026 |
| OSTERWEIS CAPITAL MANAGEMENT INC | 237,480 | $7,471 |
| ExodusPoint Capital Management, LP | 237,198 | $7,462 |
| FRONTIER CAPITAL MANAGEMENT CO LLC | 234,180 | $7,367 |
| Rockefeller Capital Management L.P. | 228,186 | $7,179 |
| WASATCH ADVISORS LP | 222,412 | $6,997 |
| SEGALL BRYANT & HAMILL, LLC | 218,343 | $6,869 |
| MARSHALL WACE, LLP | 217,442 | $6,841 |
| BLAIR WILLIAM & CO/IL | 210,266 | $6,615 |
| Werba Rubin Papier Wealth Management | 210,000 | $6,607 |
| BNP PARIBAS ARBITRAGE, SA | 207,976 | $6,543 |
| NOMURA ASSET MANAGEMENT INTERNATIONAL INC. | 194,041 | $6,105 |
| Squarepoint Ops LLC | 191,581 | $6,027 |
| PEREGRINE CAPITAL MANAGEMENT LLC | 185,824 | $5,846 |
| Mitsubishi UFJ Kokusai Asset Management Co., Ltd. | 174,739 | $5,375 |
| SILVERCREST ASSET MANAGEMENT GROUP LLC | 170,957 | $5,378 |
| TD Asset Management Inc | 163,434 | $5,142 |
| FEDERATED HERMES, INC. | 150,000 | $4,719 |
| Bank of New York Mellon Corp | 149,109 | $4,691 |
| Trexquant Investment LP | 147,988 | $4,656 |
| CITIGROUP INC | 144,601 | $4,549 |
| UBS ASSET MANAGEMENT AMERICAS INC | 135,792 | $4,272 |
| PINNACLE ASSOCIATES LTD | 123,194 | $3,876 |
| Frank, Rimerman Advisors LLC | 122,482 | $3,853 |
| DAFNA Capital Management LLC | 120,000 | $3,775 |
| FirstWave Capital Management LLC | 119,523 | $3,760 |
| TRANSATLANTIQUE PRIVATE WEALTH LLC | 118,436 | $3,726 |
| RENAISSANCE TECHNOLOGIES LLC | 117,466 | $3,695 |
| XTX Topco Ltd | 112,734 | $3,547 |
| Swiss National Bank | 109,700 | $3,451 |
| Evolutionary Tree Capital Management, LLC | 100,910 | $3,175 |
| Robocap Asset Management Ltd | 99,842 | $3,141 |
| DnB Asset Management AS | 99,567 | $3,132 |
| Mitsubishi UFJ Trust & Banking Corp | 97,857 | $3,079 |
| BARCLAYS PLC | 96,329 | $3,031 |
| WELLS FARGO & COMPANY/MN | 93,861 | $2,953 |
| CITADEL ADVISORS LLC | 91,061 | $2,865 |
| ENVESTNET ASSET MANAGEMENT INC | 88,063 | $2,770 |
| Engineers Gate Manager LP | 87,143 | $2,742 |
| NORGES BANK | 86,158 | $2,711 |
| SG Americas Securities, LLC | 84,294 | $3 |
| STATE OF WISCONSIN INVESTMENT BOARD | 83,719 | $2,634 |
| Taylor Frigon Capital Management LLC | 72,011 | $2,265 |
| SEI INVESTMENTS CO | 70,950 | $2,232 |
| HRT FINANCIAL LP | 69,872 | $2 |
| abrdn plc | 69,142 | $2,175 |
| Schonfeld Strategic Advisors LLC | 68,011 | $2,140 |
| RHUMBLINE ADVISERS | 65,454 | $2,059 |
| MANUFACTURERS LIFE INSURANCE COMPANY, THE | 64,221 | $2,023 |
| Holocene Advisors, LP | 62,667 | $1,972 |
| B. Metzler seel. Sohn & Co. AG | 59,200 | $1,864 |
| ALGERT GLOBAL LLC | 57,888 | $2 |
| Lane Generational LLC | 56,824 | $1,788 |
| CALIFORNIA STATE TEACHERS RETIREMENT SYSTEM | 52,247 | $1,644 |
| Legal & General Group Plc | 51,483 | $1,620 |
| Generali Investments Towarzystwo Funduszy Inwestycyjnych | 50,000 | $1,573 |
| DEUTSCHE BANK AG\ | 47,780 | $1,503 |
| JPMORGAN CHASE & CO | 47,144 | $1,483 |
| Creative Planning | 46,772 | $1,471 |
| Quantbot Technologies LP | 46,502 | $1,463 |
| KRS Capital Management, LLC | 45,715 | $1,438 |
| Invesco Ltd. | 43,570 | $1,371 |
| 159 other institutions | 1,719,416 | $48,377 |