| VANGUARD GROUP INC | 19,718,648 | $2,053,500 |
| BlackRock, Inc. | 15,246,769 | $1,587,799 |
| STATE STREET CORP | 8,622,101 | $897,906 |
| PRICE T ROWE ASSOCIATES INC /MD/ | 7,433,157 | $774 |
| FMR LLC | 6,027,858 | $627,741 |
| GEODE CAPITAL MANAGEMENT, LLC | 4,428,737 | $459,480 |
| Pictet Asset Management Holding SA | 4,223,831 | $439,898 |
| Amundi | 3,745,901 | $390,112 |
| NORDEA INVESTMENT MANAGEMENT AB | 3,484,915 | $366,787 |
| Invesco Ltd. | 3,414,386 | $355,574 |
| Impax Asset Management Group plc | 3,311,159 | $344,824 |
| AMERIPRISE FINANCIAL INC | 3,080,549 | $320,808 |
| MASSACHUSETTS FINANCIAL SERVICES CO /MA/ | 2,638,855 | $274,810 |
| UBS ASSET MANAGEMENT AMERICAS INC | 2,636,064 | $274,520 |
| MORGAN STANLEY | 2,474,549 | $257,700 |
| DIMENSIONAL FUND ADVISORS LP | 2,305,827 | $240,146 |
| NORTHERN TRUST CORP | 2,059,105 | $214,435 |
| DEUTSCHE BANK AG\ | 1,665,522 | $173,447 |
| KAYNE ANDERSON RUDNICK INVESTMENT MANAGEMENT LLC | 1,659,380 | $172,808 |
| PANAGORA ASSET MANAGEMENT INC | 1,550,935 | $161,514 |
| ProShare Advisors LLC | 1,493,619 | $155,545 |
| DekaBank Deutsche Girozentrale | 1,489,715 | $131 |
| CHARLES SCHWAB INVESTMENT MANAGEMENT INC | 1,451,495 | $151,159 |
| GOLDMAN SACHS GROUP INC | 1,371,643 | $142,843 |
| UBS Group AG | 1,344,262 | $139,991 |
| BESSEMER GROUP INC | 1,230,180 | $128 |
| MIRAE ASSET GLOBAL ETFS HOLDINGS Ltd. | 1,175,033 | $122,370 |
| Legal & General Group Plc | 1,118,768 | $116,508 |
| AQR CAPITAL MANAGEMENT LLC | 1,114,299 | $116,043 |
| ALLIANCEBERNSTEIN L.P. | 1,091,202 | $113,638 |
| KBC Group NV | 982,681 | $102 |
| Bank of New York Mellon Corp | 951,420 | $99,081 |
| NOMURA ASSET MANAGEMENT CO LTD | 918,190 | $95,620 |
| Gates Capital Management, Inc. | 902,606 | $93,997 |
| Man Group plc | 820,998 | $85,499 |
| JPMORGAN CHASE & CO | 800,882 | $83,404 |
| FIRST TRUST ADVISORS LP | 794,924 | $82,783 |
| Assenagon Asset Management S.A. | 729,663 | $75,987 |
| Swedbank AB | 697,005 | $72,586 |
| BALYASNY ASSET MANAGEMENT L.P. | 688,197 | $71,669 |
| BANK OF AMERICA CORP /DE/ | 661,158 | $68,853 |
| Squarepoint Ops LLC | 640,803 | $66,733 |
| Allianz Asset Management GmbH | 613,932 | $63,935 |
| 140 Summer Partners LP | 607,112 | $63,225 |
| Zurcher Kantonalbank (Zurich Cantonalbank) | 594,222 | $61,882 |
| SCHRODER INVESTMENT MANAGEMENT GROUP | 578,727 | $61,218 |
| BARCLAYS PLC | 535,864 | $55,805 |
| BNP PARIBAS ARBITRAGE, SA | 526,258 | $54,805 |
| Gotham Asset Management, LLC | 491,817 | $51,218 |
| ZACKS INVESTMENT MANAGEMENT | 485,667 | $50,577 |
| Nuveen, LLC | 460,429 | $47,949 |
| PARNASSUS INVESTMENTS, LLC | 456,104 | $47,499 |
| ENVESTNET ASSET MANAGEMENT INC | 455,796 | $47,467 |
| BNP Paribas Investment Partners S.A. | 454,692 | $47 |
| CBOE Vest Financial, LLC | 451,137 | $46,981 |
| Swiss National Bank | 448,387 | $46,695 |
| NORTHWESTERN MUTUAL WEALTH MANAGEMENT CO | 423,266 | $44,079 |
| Robeco Schweiz AG | 419,765 | $43,714 |
| CAISSE DE DEPOT ET PLACEMENT DU QUEBEC | 409,169 | $42,611 |
| Sumitomo Mitsui Trust Holdings, Inc. | 403,988 | $42,071 |
| Mitsubishi UFJ Kokusai Asset Management Co., Ltd. | 395,183 | $41,680 |
| Russell Investments Group, Ltd. | 386,168 | $40,466 |
| MILLENNIUM MANAGEMENT LLC | 372,986 | $38,843 |
| SG Americas Securities, LLC | 362,648 | $38 |
| NORGES BANK | 353,355 | $36,798 |
| DEROY & DEVEREAUX PRIVATE INVESTMENT COUNSEL INC | 352,684 | $37 |
| RAYMOND JAMES FINANCIAL INC | 342,916 | $35,910 |
| Bank Julius Baer & Co. Ltd, Zurich | 341,930 | $35,640 |
| Woodline Partners LP | 332,287 | $34,604 |
| Treasurer of the State of North Carolina | 329,788 | $34 |
| EVENTIDE ASSET MANAGEMENT, LLC | 326,280 | $34,026 |
| RHUMBLINE ADVISERS | 324,949 | $33,840 |
| CALIFORNIA PUBLIC EMPLOYEES RETIREMENT SYSTEM | 320,183 | $33,344 |
| ROYAL BANK OF CANADA | 314,653 | $32,768 |
| T. Rowe Price Investment Management, Inc. | 309,353 | $32 |
| DZ BANK AG Deutsche Zentral Genossenschafts Bank, Frankfurt | 288,526 | $30,047 |
| Clark Capital Management Group, Inc. | 287,504 | $29,941 |
| AVIVA PLC | 282,072 | $29,375 |
| CALIFORNIA STATE TEACHERS RETIREMENT SYSTEM | 269,177 | $28,032 |
| WELLS FARGO & COMPANY/MN | 257,578 | $26,824 |
| Vontobel Holding Ltd. | 256,623 | $26,725 |
| DUFF & PHELPS INVESTMENT MANAGEMENT CO | 250,547 | $26,092 |
| Clean Energy Transition LLP | 247,161 | $25,739 |
| Quantinno Capital Management LP | 244,418 | $25,454 |
| abrdn plc | 238,534 | $24,841 |
| Zuckerman Investment Group, LLC | 235,787 | $24,555 |
| VICTORY CAPITAL MANAGEMENT INC | 234,786 | $24,451 |
| FIL Ltd | 229,717 | $23,923 |
| Andra AP-fonden | 206,000 | $21,453 |
| PRINCIPAL FINANCIAL GROUP INC | 205,808 | $21,433 |
| STRS OHIO | 204,818 | $21,330 |
| CITIGROUP INC | 198,437 | $20,665 |
| ADAGE CAPITAL PARTNERS GP, L.L.C. | 197,702 | $20,589 |
| NEUBERGER BERMAN GROUP LLC | 188,531 | $19,634 |
| Handelsbanken Fonder AB | 181,061 | $19 |
| DANSKE BANK A/S | 176,305 | $18,360 |
| CIBC Private Wealth Group, LLC | 172,288 | $17,942 |
| STIFEL FINANCIAL CORP | 171,356 | $17,846 |
| Universal- Beteiligungs- und Servicegesellschaft mbH | 168,410 | $17,666 |
| Calamos Advisors LLC | 163,874 | $17,066 |
| 670 other institutions | 11,585,547 | $1,083,310 |